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PAMBE 를 이용하여 성장된 AlN 박막의 미세구조에 미치는 Al / N 비율영향

홍성의, 한기평, 백문철, 조경익, 윤순길

Effects of Al / N Ratio on Microstructure of AlN Films Grown by PAMBE

Sung Ui Hong, Gee Pyeong Han, Mun Cheol Paek, Kyung Ik Cho, Soon Gil Yoon
J Electr Electron Mater 2001;14(12):972-978.
Published online: December 1, 2001
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Effects of Al / N Ratio on Microstructure of AlN Films Grown by PAMBE
J Electr Electron Mater. 2001;14(12):972-978.   Published online December 1, 2001
Download Citation

Download a citation file in RIS format that can be imported by all major citation management software, including EndNote, ProCite, RefWorks, and Reference Manager.

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Include:
Effects of Al / N Ratio on Microstructure of AlN Films Grown by PAMBE
J Electr Electron Mater. 2001;14(12):972-978.   Published online December 1, 2001
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