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반도체 : 유도결합 플라즈마에 의한 (Ba,Sr)TiO3 박막의 식각 손상에 관한 연구

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Damages of Etched (Ba,Sr)TiO3 Thin Films by Inductively Coupled Plasmas

Sung Ki Choi, Chang Il Kim, Eui Goo Chang
J Electr Electron Mater 2001;14(10):785-791.
Published online: October 1, 2001
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Damages of Etched (Ba,Sr)TiO3 Thin Films by Inductively Coupled Plasmas
J Electr Electron Mater. 2001;14(10):785-791.   Published online October 1, 2001
Download Citation

Download a citation file in RIS format that can be imported by all major citation management software, including EndNote, ProCite, RefWorks, and Reference Manager.

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Damages of Etched (Ba,Sr)TiO3 Thin Films by Inductively Coupled Plasmas
J Electr Electron Mater. 2001;14(10):785-791.   Published online October 1, 2001
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