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RF Magnetron 스퍼터링법으로 성장시킨 Ba(Zr0.2Ti0.8)O3 박막의 특성

최원석, 장범식, 김진철, 박태석, 이준신, 홍병유

Preparation and Properties of Ba(Zr0.2Ti0.8)O3 Thin Films Grown by RF Magnetron Sputtering Method

Won Seok Choi, Bum Sik Jang, Jin Cheol Kim, Tae Seok Park, Jun Sin Yi, Byung You Hong
J Electr Electron Mater 2001;14(7):567-571.
Published online: July 1, 2001
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Preparation and Properties of Ba(Zr0.2Ti0.8)O3 Thin Films Grown by RF Magnetron Sputtering Method
J Electr Electron Mater. 2001;14(7):567-571.   Published online July 1, 2001
Download Citation

Download a citation file in RIS format that can be imported by all major citation management software, including EndNote, ProCite, RefWorks, and Reference Manager.

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Preparation and Properties of Ba(Zr0.2Ti0.8)O3 Thin Films Grown by RF Magnetron Sputtering Method
J Electr Electron Mater. 2001;14(7):567-571.   Published online July 1, 2001
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