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논문요지 / 볼츠만방정식과 몬테칼로법에 의한 SiH4-Ar 혼합가스의 전자수송계수에 관한 연구

하성철, 전병훈

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J Electr Electron Mater 2001;14(2):53-53.
Published online: February 1, 2001
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J Electr Electron Mater. 2001;14(2):53-53.   Published online February 1, 2001
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J Electr Electron Mater. 2001;14(2):53-53.   Published online February 1, 2001
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