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J Electr Electron Mater : Journal of Electrical and Electronic Materials

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논문요지 / 새로운 ICP 장치를 이용한 고온 초전도체의 Dry Etching 과 기존의 Wet Etching 기술과의 비교

강형곤, 임성훈, 임연호, 한윤봉, 황종선, 한병성

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J Electr Electron Mater 2001;14(2):52-53.
Published online: February 1, 2001
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J Electr Electron Mater. 2001;14(2):52-53.   Published online February 1, 2001
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J Electr Electron Mater. 2001;14(2):52-53.   Published online February 1, 2001
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