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논문요지 / 단결정 6H - SiC 의 광전화학습식식각에 대한 연구

송정균, 정두찬, 신무환

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J Electr Electron Mater 2001;14(2):51-51.
Published online: February 1, 2001
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J Electr Electron Mater. 2001;14(2):51-51.   Published online February 1, 2001
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J Electr Electron Mater. 2001;14(2):51-51.   Published online February 1, 2001
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