A Study on Silicidation and properties of Titanium Film on Polysilicon by Rapid Thermal Annealing

Young Soo Kim; Won Yell Han; Young Kull Park

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다결정 실리콘 위에서의 Titanium Silicide 형성과 그 특성

김영수, 한원열, 박영걸

A Study on Silicidation and properties of Titanium Film on Polysilicon by Rapid Thermal Annealing

Young Soo Kim, Won Yell Han, Young Kull Park

J Electr Electron Mater 1991;4(4):304-311.

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A Study on Silicidation and properties of Titanium Film on Polysilicon by Rapid Thermal Annealing

J Electr Electron Mater. 1991;4(4):304-311.

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Download a citation file in RIS format that can be imported by all major citation management software, including EndNote, ProCite, RefWorks, and Reference Manager.

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Citation for the content below
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A Study on Silicidation and properties of Titanium Film on Polysilicon by Rapid Thermal Annealing

J Electr Electron Mater. 1991;4(4):304-311.

Articles

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다결정 실리콘 위에서의 Titanium Silicide 형성과 그 특성

A Study on Silicidation and properties of Titanium Film on Polysilicon by Rapid Thermal Annealing

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