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A Study on the Enhancement of Electrical Conductivity of Copper Thin Fuilms Prepared by CVD Technology

Nam Ihn Cho, Yong Suk Kim, Chang Kyo Kim
J Electr Electron Mater 2000;13(6):459-466.
Published online: June 1, 2000
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A Study on the Enhancement of Electrical Conductivity of Copper Thin Fuilms Prepared by CVD Technology
J Electr Electron Mater. 2000;13(6):459-466.   Published online June 1, 2000
Download Citation

Download a citation file in RIS format that can be imported by all major citation management software, including EndNote, ProCite, RefWorks, and Reference Manager.

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A Study on the Enhancement of Electrical Conductivity of Copper Thin Fuilms Prepared by CVD Technology
J Electr Electron Mater. 2000;13(6):459-466.   Published online June 1, 2000
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