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반응성 마그네트론 스파트링 프로세스의 제작 및 AI 계 박막형성에 관한 연구

박정후, 김광화, 조정수, 곽영순

Study on Reactive magnetron Sputtering process and Thin Film of AIN

Chung Hoo Paek, Kwang Hwa Kim, Jung Soo Cho, Young Soon Kwak
J Electr Electron Mater 1991;4(3):239-248.
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Study on Reactive magnetron Sputtering process and Thin Film of AIN
J Electr Electron Mater. 1991;4(3):239-248.
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Study on Reactive magnetron Sputtering process and Thin Film of AIN
J Electr Electron Mater. 1991;4(3):239-248.
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