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"ZrInZnO"

Study on the Electrical Characteristics of Solution-processed ZrInZnO Thin-film Transistors
Tae Hoon Jeong, Si Joon Kim, Doo Hyun Yoon, Woong Hee Jeong, Dong Lim Kim, Hyun Soo Lim, Hyun Jae Kim
J Electr Electron Mater 2011;24(6):458-462.   Published online June 1, 2011
Soution-processed ZrInZnO (ZIZO) thin-film transistors (TFTs) with varying Zr content were fabricated. The ZIZO TFT (Zr=20 at. %/Zn) has an optimal performance with the saturation field effect mobility of 0.77 cm2/Vs, the threshold voltage (Vth) of 2.1 V, the on/off ratio of 4.95×10(6), and subthreshold swing (S.S) of 0.73 V/decade. Using this optimized ZIZO TFT, the positive and negative gate bias stress according to annealing temperature was also investigated. While the Vth shifts dramatically after 1,000 s of both gate bias stresses, variations in the S.S are negligible. It suggests that electrons or holes are temporarily trapped in the gate insulator, the semiconductor, or the interface between both layers.
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