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"X-ray topography"

Dislocation Analysis of CVD Single Crystal Diamond Using Synchrotron White Beam X-Ray Topography
Yeong-jae Yu, Seong-min Jeong, Si-young Bae
J Electr Electron Mater 2019;32(3):192-195.   Published online May 1, 2019
Single-crystal diamond obtained by chemical vapor deposition (CVD) exhibits great potential for use in next-generation power devices. Low defect density is required for the use of such power devices in high-power operations; however, plastic deformation and lattice strain increase the dislocation density during diamond growth by CVD. Therefore, characterization of the dislocations in CVD diamond is essential to ensure the growth of high-quality diamond. In this work, we analyze the characteristics of the dislocations in CVD diamond through synchrotron white beam X-ray topography. In estimate, many threading edge dislocations and five mixed dislocations were identified over the whole surface.
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