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Effects of Ozone Oxidation on the Contact Resistance of DRAM Cell
Jae Seung Choe, Seung Ug Lee, Bong Jo Sin, Geun Hyeong Park, Jae Bong Lee
J Korean Inst Electr Electron Mater Eng 2004;17(2):121-126.   Published online February 1, 2004
DOI: https://doi.org/10.4313/JKEM.2004.17.2.121
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