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Wafer pairs
WHERE t1.sid in(parameter_dbtbl_keyword '%Wafer pairs%') and t1.xml_status <> 99
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Gi Yeong Lee (1)
O Seong Song (1)
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"Wafer pairs"
Direct Bonding of Heterogeneous Insulator Silicon Pairs using Various Annealing Method
O Seong Song, Gi Yeong Lee
J Electr Electron Mater
2003;16(10):859-864.
Published online October 1, 2003
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