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"Variable optical attenuator"

Display,Optical Devices : Variable Optical Attenuator using Parallel Plate Electrostatic Actuator
Tae Yeob Kim, Jae Seong Heo, Seong Ug Mun, Hyeon Jun Sin, Sang Lyeol Lee
J Electr Electron Mater 2004;17(4):448-452.   Published online April 1, 2004
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