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"Vacuum chuck"

Synthesis of Electro-conducting Macroporous Aluminosilicate-Carbon Nanocomposite
Kwang Min Choi, Woo-seok Cho, Jong-young Kim, Jong-yeol Jung, Seung-woo Baik, Kyu Hyoung Lee
J Korean Inst Electr Electron Mater Eng 2017;30(2):67-73.   Published online February 1, 2017
DOI: https://doi.org/10.4313/JKEM.2017.30.2.67
Recently, macroporous ceramic materials with high electrical conductivity and mechanical strength are urgently needed for semiconductor and display manufacturing devices. In this work, we obtained electro-conducting macroporous aluminosilicate ceramics having surface resistivity of 108~1,010 ohm by dispersing electro-conducting carbon in ceramic matrix. By addition of 0.5~3.0 wt% frit glass, chemical bonding between grains was strengthened, and flexural strength was enhanced up to 160 MPa as a result. We evaluated the characteristics of present ceramics as vacuum chuck module for liquid crystal display display manufacturing devices.
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