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VO2
WHERE t1.sid in(parameter_dbtbl_keyword '%VO2%') and t1.xml_status <> 99
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Hee Sung Jung (1)
Sung Ihl Kim (1)
Kwang Ho Kwon (1)
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"VO2"
Etching Characteristics of VO2 Films in Inductively coupled CI2,Ar Plasma
Hee Sung Jung, Sung Ihl Kim, Kwang Ho Kwon
J Electr Electron Mater
2008;21(8):727-732.
Published online August 1, 2008
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