Ultrasonic wave technologies have been widely used in ultrasonic washing machines, ultrasonic surgery, ultrasonic welding machines, ultrasonic sensors, and medical instruments. Ultrasonic surgery can be realized through the cavitation effect of ultrasonic waves. In this study, piezoelectric ceramics were manufactured to achieve the optimum design of a piezoelectric vibrator in a handheld generator for ultrasonic surgery. The best specimen showed the excellent piezoelectric properties of kp＝0.624, Qm＝1,531, and d₃₃＝356 pC/N. Numerical modeling based on the finite element method was performed to find the resonance frequency, the anti-resonance frequency, and the displacement properties of the handheld ultrasonic generator. Maximum displacement was observed in the six-step piezoelectric vibrator at 6.36 μm.

Pb(Mn_1/3Nb_2/3)_0.07(Ni_1/3Nb_2/3)_0.10(Zr_0.5Ti_0.5)_0.83O₃ composition ceramics with high piezoelectric properties were fabricated by the columbite precursor method for ultrasonic generators, and the effects of sintering temperature on microstructure and piezoelectric properties were systematically investigated. It was found that the tetragonality of the ceramics decreased with increase in sintering temperature. Moreover, excellent physical properties such as d₃₃=447 pC/N, ε_r=1,843, k_p=0.641, and Q_m=1,207 were obtained for an ultrasonic generator when the second calcination temperature and sintering temperature were 720℃ and 920℃, respectively.

In this paper, Pb(Mn_1/3Nb_2/3)_0.07(Ni_1/3Nb_2/3)_0.10(Zr_0.5Ti_0.5)_0.83O₃ ceramics were fabricated by the conventional solid state method to obtain excellent dielectric properties for ultrasonic generators. The effects of 2nd calcination temperature on their microstructure and piezoelectric properties were systematically investigated. The tetragonality increased in the ceramics when 2nd calcination temperature increased to the optimized temperature at 750℃. At that temperature, excellent physical properties (d₃₃= 352 pC/N, ε_r= 1,687, k_p= 0.570, Q_m= 1,640) were obtained for ultrasonic generator application.