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Tunneling mechanism
WHERE t1.sid in(parameter_dbtbl_keyword '%Tunneling mechanism%') and t1.xml_status <> 99
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"Tunneling mechanism"
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MOS tunnel capacitor (1)
oxidation rate (1)
Rapid thermal dry oxidation technique (1)
Tunneling mechanism (1)
Ultra-thin silicon dioxide (1)
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2004 (1)
Authors
Sang Hyeon Jeong (1)
Gwang Ho Kim (1)
Yong Seong Kim (1)
Su Hong Lee (1)
Keywords
MOS tunnel capacitor (1)
oxidation rate (1)
Rapid thermal dry oxidation technique (1)
Tunneling mechanism (1)
Ultra-thin silicon dioxide (1)
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authors
Sang Hyeon Jeong (1)
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"Tunneling mechanism"
Growth and Properties of Ultra-thin SiO2 Films by Rapid Thermal Dry Oxidation Technique
Sang Hyeon Jeong, Gwang Ho Kim, Yong Seong Kim, Su Hong Lee
J Electr Electron Mater
2004;17(1):21-26.
Published online January 1, 2004
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