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"Thin-film transistors"

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"Thin-film transistors"

Effect of Working Pressure Conditions during Sputtering on the Electrical Performance in Te Thin-Film Transistors
Kyu Ri Lee, Hyun-suk Kim
J Electr Electron Mater 2022;35(2):190-193.   Published online March 1, 2022
DOI: https://doi.org/10.4313/JKEM.2022.35.2.13
In this work, the effect of sputtering working pressure for the tellurium film and its thin-film transistor was investigated. The transfer characteristics of tellurium thin-film transistors were improved by increasing the working pressure during sputtering process. As increasing working pressure, physical and optical properties of Te films such as crystallinity, transmittance, and surface roughness were improved. Therefore, the improved transfer characteristics of Te thin-film transistors may originate from both improved interface properties between the silicon oxide gate dielectric layer and the tellurium active layer with an improved quality of Te film. In conclusion, the control of working pressure during sputtering would be important for obtaining highperformance tellurium-based thin film transistor.
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Evaluation of Electrical Properties of IZO Thin-Film with UV Post-Annealing Treatment Time
Jae-yun Lee, Han-sang Kim, Sung-jin Kim
J Electr Electron Mater 2020;33(2):93-98.   Published online March 1, 2020
DOI: https://doi.org/10.4313/JKEM.2021.33.2.3
We investigated the effect of a post-annealing process using ultraviolet (UV) light on the electrical properties of solution-processed InZnO (IZO) thin-film transistors (TFTs). UV light was irradiated on IZO TFTs for different time periods of 0s, 30s, and 90s. We measured transfer and retention stability curves to evaluate the performance of the fabricated TFTs. In addition, we measured height, amplitude, and phase AFM images to analyze changes in the surface and morphology of the devices. AFM measurements were performed by setting the drive amplitude of the cantilever tip to 47.9 mV in tapping mode, then dividing the device surface into 500 nm × 500 nm. In the case of IZO TFT irradiated with UV for 30s, the electron mobility and Ion/Ioff ratio were improved, the threshold voltage was reduced by approximately 2 V, and the subthreshold swing also decreased form 1.34 V/dec to 1.11 V/dec.
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Improvement in Electrical Characteristics of Solution-Processed In-Zn-O Thin-Film Transistors Using a Soft Baking Process
Han-sang Kim, Sung-jin Kim
J Electr Electron Mater 2017;30(9):566-571.   Published online September 1, 2017
A soft baking process was used to enhance the electrical characteristics of solution-processed indium-zincoxide (IZO) thin-film transistors (TFTs). We demonstrate a stable soft baking process using a hot plate in air to maintain the electrical stability and improve the electrical performance of IZO TFTs. These oxide transistors exhibited good electrical performance; a field-effect mobility of 7.9 cm2/Vs, threshold voltage of 1.4 V, sub-threshold slope of 0.5 V/dec, and a current on/off ratio of 2.9×107 were measured. To investigate the static response of our solutionprocessed IZO TFTs, simple resistor load type inverters were fabricated by connecting a resistor (5 or 10 MΩ). Our IZO TFTs, which were manufactured using the soft baking process at a baking temperature of 120℃, performed well at the operating voltage, and are therefore a good candidate for use in advanced logic circuits and transparent display backplanes.
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Effect of Thin-Film Thickness on Electrical Performance of Indium-Zinc-Oxide Transistors Fabricated by Solution Process
Han-sang Kim, Dong-gu Kyung, Sung-jin Kim
J Electr Electron Mater 2017;30(8):469-473.   Published online August 1, 2017
We investigated the effect of different thin-film thicknesses (25, 30, and 40 nm) on the electrical performance of solution-processed indium-zinc-oxide (IZO) thin-film transistors (TFTs). The structural properties of the IZO thin films were investigated by atomic force microscopy (AFM). AFM images revealed that the IZO thin films with thicknesses of 25 and 40 nm exhibit an uneven distribution of grains, which deforms the thin film and degrades the performance of the IZO TFT. Further, the IZO thin film with a thickness of 30 nm exhibits a homogeneous and smooth surface with a low RMS roughness of 1.88 nm. The IZO TFTs with the 30-nm-thick IZO film exhibit excellent results, with a field-effect mobility of 3.0(±0.2) cm2/Vs, high Ion/Ioff ratio of 1.1×107, threshold voltage of 0.4(±0.1) V, and subthreshold swing of 0.7(±0.01) V/dec. The optimization of oxide semiconductor thickness through analysis of the surface morphologies can thus contribute to the development of oxide TFT manufacturing technology.
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Annealing Effects on Ambipolar Characteristics of Diketopyrrolopyrrole-Based Polymer Thin-Film Transistors
Gyu Bok Yoon, Jiyoul Lee
J Electr Electron Mater 2017;30(3):180-184.   Published online March 1, 2017
In this study, we examine the electrical properties of diketopyrrolopyrrole (DPP) containing polymer semiconductors that have been reported to show high performance with ambipolar characteristics. We prepared three different DPP based polymer semiconductors (PDPPTPT, PDPP3T, and PDPP2T-TT) and fabricated organic thin film transistors (OTFTs) with ambipolar polymer semiconductors as an active layer. All three DPP polymers showed only p-type properties at initial measurements. However, after annealing in vacuum oven for 24 hours, it was found that the DPP based polymers have both p-type and n-type properties. It is speculated that the residual impurities supposedly regarded as a strong electron trap source were eliminated during the vacuum process.
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Effects of Soft Baking Temperature on the Properties of Solution Processed Zn-Sn-O Thin-Film Transistors
Jae Won Lee, Won Ju Choa
J Electr Electron Mater 2016;29(1):6-10.   Published online January 1, 2016
In this study, the effects of soft baking temperature on the solution derived ZTO (Zn-Sn-O) TFTs (thin-film transistors) as a In-free oxide semiconductor were investigated. In spite of the same hard baking at high temperature(600℃), the electrical properties of ZTO TFT was greatly changed by a small difference in soft baking temperature(180~250℃). The performance of TFT was deteriorated as the soft baking temperature increased. Therefore, it is important to remove the water-related defects well as organic impurities from the ZTO films during soft baking for fabrication of solution-derived high performance of TFTs.
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Study on the Thin-film Transistors Based on TiO2 Active-channel Using Atomic Layer Deposition Technique
Sung Jin Kim
J Electr Electron Mater 2015;28(7):415-418.   Published online July 1, 2015
In this paper, TiO2 based thin-film transistors (TFTs) were fabricated using by an atomic layer deposition with high aspect ratio and excellent step coverage. Ti02 semiconducting layer was deposited showing a rutile phase through the rapid thermal annealing process, and exhibited TFT characteristics with a 200 pm channel length of low-leakage currents (none of current flow during off-state), stable threshold voltages (-10 V - 0 V), and a much higher on/off current ratio (
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