This study investigates the effect of mask material and thickness on the silicon etching profile using a high-density plasma (HDP) etching system, aiming to reduce optical loss in silicon-based optical waveguides. As the mask thickness increased, the etching sidewall angle became steeper. An etching profile angle of 87° was obtained when tetraethyl orthosilicate (TEOS) was used as the mask material, while 80° was obtained for photoresist (PR). This is attributed to electron charging on the mask surface in the plasma. The charged mask modifies the distribution and strength of the electric field depending on its thickness, thereby affecting the trajectory of positive ions accelerated toward the substrate by the bias voltage. Furthermore, Plasma diagnostics using optical emission spectroscopy (OES) and surface composition analysis using field emission Auger electron spectroscopy (FE-AES) revealed that changes in the mask material also alter the reaction pathways and formation characteristics of active species and silicon by-products in the plasma. These results suggest that the mask material influences the overall plasma characteristics, including electron density and ion energy, and plays a critical role in the precise control of silicon etching profiles for high-performance optical device fabrication.

Currently, the most developed new energy source is solar energy. Because solar power is installed outside, it is exposed to many pollutants. Pollutants are causing the characteristics of solar energy to deteriorate. Therefore, this study aims to develop a water-repellent coating to prevent contamination of solar modules. Silica and Titania materials are mainly used as water-repellent coating materials. In this study, it was based on silica and the contact angle characteristics were measured according to the change in the amount of silica and ammonia water added and the number of coatings. As a result of the measurement, it was confirmed that the contact angle was more than 60 degrees when 0.5 mol of TEOS was added to 50 mL and 0.15 M when 1 mL of ammonia water was added to 296.47 ml of distilled water. And it was confirmed that the contact angle improved when the number of coatings was applied twice. A water-repellent coating material was applied to low iron tempered glass used to protect dye-sensitized solar cell modules. The characteristics of the module were measured after spraying DI-Water on low-emission tempered glass with a water-repellent coating. As a result of the measurement, the efficiency of the module without application, the efficiency of the module coated once, and the module coated twice were 4.87%, 4.90%, and 4.91%, respectively. It was confirmed that the efficiency of the module increased by applying water-repellent coating. As a result of this study, it is determined that the water-repellent coating material will help improve solar power generation efficiency and lifespan by being self-cleaning and non-reflective.