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"Stick-slip"

A Study on the Characteristics of Stick-slip Friction in CMP
J Korean Inst Electr Electron Mater Eng 2005;18(4):313-320.   Published online April 1, 2005
DOI: https://doi.org/10.4313/JKEM.2005.18.4.313

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  • Effect of Slurry Film Thickness Variation according to Spray Range Using Ultrasonic Spray Nozzle on Material Removal Rate
    Seongnyeong Heo, Seonho Jeong, Minji Kim, Youngwook Park, Haedo Jeong
    Journal of the Korean Society for Precision Engineering.2022; 39(9): 675.     CrossRef
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