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SnO2 thin film
WHERE t1.sid in(parameter_dbtbl_keyword '%SnO2 thin film%') and t1.xml_status <> 99
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chemical mechanical polishing (1)
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2004 (1)
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"SnO2 thin film"
A Study on CMP Properties of SnO2 Thin Film for Application of Gas Sensor
J Electr Electron Mater
2004;17(12):1296-1300.
Published online December 1, 2004
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