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"Single trench gate"

The Optimal Design and Electrical Characteritics of 1,700 V Class Double Trench Gate Power MOSFET Based on SiC
Ji Yeon Ryou, Dong Hyeon Kim, Dong Hyeon Lee, Ey Goo Kang
J Electr Electron Mater 2023;36(4):385-390.   Published online July 1, 2023
DOI: https://doi.org/10.4313/JKEM.2023.36.4.9
In this paper, the 1,700 V level SiC-based power MOSFET device widely used in electric vehicles and new energy industries was designed, that is, a single trench gate power MOSFET structure and a double trench gate power MOSFET structure were proposed to analyze electrical characteristics while changing the design and process parameters. As a result of comparing and analyzing the two structures, it can be seen that the double trench gate structure shows quite excellent characteristics according to the concentration of the drift layer, and the breakdown voltage characteristics according to the depth of the drift layer also show excellent characteristics of 200 V or more. Among them, the trench gate power MOSFET device can be applied not only to the 1,700 V class but also to a voltage range above it, and it is believed that it can replace all Si devices currently applied to electric vehicles and new energy industries.
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