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Silicon-nitride thin film
WHERE t1.sid in(parameter_dbtbl_keyword '%Silicon-nitride thin film%') and t1.xml_status <> 99
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"Silicon-nitride thin film"
Characterization of Piezoelectric Microspeaker Fabricated with C-axis Oriented ZnO Thin Film
J Electr Electron Mater
2006;19(6):531-537.
Published online June 1, 2006
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