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"Silicon hard master"

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"Silicon hard master"

Multi-mode Planar Waveguide Fabricated by a (110) Silicon Hard Master
Yu Min Jung, Yeong Cheol Kim
J Korean Inst Electr Electron Mater Eng 2005;18(12):1106-1110.   Published online December 1, 2005
DOI: https://doi.org/10.4313/JKEM.2005.18.12.1106

Citations

Citations to this article as recorded by  
  • (110) Silicon Hard Master Fabrication Using Wet Etching for Multi-Mode Planar Optical Splitter
    Yu Min Jung, Yeong Cheul Kim, Hwa Il Seo
    Key Engineering Materials.2006; 321-323: 1704.     CrossRef
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