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Semi Abrasive Free Slurry
WHERE t1.sid in(parameter_dbtbl_keyword '%Semi Abrasive Free Slurry%') and t1.xml_status <> 99
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"Semi Abrasive Free Slurry"
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Keywords
Acid Colloidal Silica (1)
Chemical Mechanical Planarization (1)
Copper (1)
Semi Abrasive Free Slurry (1)
Publication year
2004 (1)
Authors
Ui Gu Jang (1)
Nam Hun Kim (1)
Sang Yong Kim (1)
Tae Hyeong Kim (1)
Yong Jin Seo (1)
Keywords
Acid Colloidal Silica (1)
Chemical Mechanical Planarization (1)
Copper (1)
Semi Abrasive Free Slurry (1)
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authors
Ui Gu Jang (1)
Nam Hun Kim (1)
Sang Yong Kim (1)
Tae Hyeong Kim (1)
Yong Jin Seo (1)
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2004 (1)
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"Semi Abrasive Free Slurry"
A Study on Semi Abrasive Free Slurry including Acid Colloidal Silica for Copper Chemical Mechanical Planarization
Nam Hun Kim, Sang Yong Kim, Yong Jin Seo, Tae Hyeong Kim, Ui Gu Jang
J Electr Electron Mater
2004;17(3):272-277.
Published online March 1, 2004
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