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"Rf reactive magnetron sputtering"

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"Rf reactive magnetron sputtering"

Effects of Deposition Temperature on the Properties of InN Thin Films Grown by Radio-frequency Reactive Magnetron Sputtering
Shin Ho Cho
J Korean Inst Electr Electron Mater Eng 2009;22(10):808-813.   Published online October 1, 2009
DOI: https://doi.org/10.4313/JKEM.2009.22.10.808
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