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Residual oxygen
WHERE t1.sid in(parameter_dbtbl_keyword '%Residual oxygen%') and t1.xml_status <> 99
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Aluminum nitride (1)
c-axis orientation (1)
Residual oxygen (1)
Substrate temperature (1)
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2008 (1)
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Seok Won Jeong (1)
Byoung Kyun Kim (1)
Eung Kwon Kim (1)
Eul Tack Lee (1)
Yong Han Roh (1)
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Aluminum nitride (1)
c-axis orientation (1)
Residual oxygen (1)
Substrate temperature (1)
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"Residual oxygen"
Influence of Residual Oxygen on the growth of AIN Thin Films with Substrate Temperature
Byoung Kyun Kim, Eul Tack Lee, Eung Kwon Kim, Seok Won Jeong, Yong Han Roh
J Electr Electron Mater
2008;21(5):463-467.
Published online May 1, 2008
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