We have proposed and demonstrated a fiber optic RH (relative humidity) sensor based on fiber Bragg grating covered with a polyimide film. As the polyimide film absolves the moisture in the air, its volume expands. As a result, the grating period of the FBG (fiber Bragg grating) covered with a polyimide film becomes wide and the Bragg wavelength is shifted. The sensor is implemented by fixing a 30 ㎛ thickness polyimide film on the surface of an optical fiber grating using an adhesive, and the characteristics of the device according to humidity are analyzed. The fabricated FBG RH sensor showed a high sensitivity of 0.0186 nm/RH% and a wide measurement range from 30% to 90%. The influence of environmental temperature on the characteristics of the RH sensor was also measured and analyzed. The feasibility of commercialization is presented.

This research, integratable capacitive relative humidity sensor was produced using polyimide on glass substrate. Also, at the time of upper electrode formation, upper electrode grain size was affected by giving changes to sputtering condition. Through this analyzing electrical characteristics affect from capacitive relative humidity sensor was possible. Capacitance of capacitive relative humidity sensor was 330 pF, linearity of 0.6%FS and it showed less than 3% of low hysterisis. Specially, hysterisis was affected more from interface than interstitial. Also was affected by the grain size which is one of the formation condition of upper electrode.