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"Reactive sputtering method"

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"Reactive sputtering method"

Properties Electric of AIN Thin Film on the Si and GaAs Substrate
J Electr Electron Mater 2008;21(1):5-11.   Published online January 1, 2008
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Electrical Characteristic of Al/AIN/GaAs MIS Capacitor Fabricated by Reactive Sputtering Method for the (NH4)2S Treatment
J Electr Electron Mater 2007;20(1):8-13.   Published online January 1, 2007
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