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"Reactive RF magnetron sputtering"

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"Reactive RF magnetron sputtering"

Temperature Dependence on Electrical Characterization of Epitaxially Grown AlN Film on 6H-SiC Structures
J Korean Inst Electr Electron Mater Eng 2006;19(1):18-22.   Published online January 1, 2006
DOI: https://doi.org/10.4313/JKEM.2006.19.1.018
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Fabrication and Properties of AIN/SiC Structures using Reactive RF Magnetron Sputtering Method
J Korean Inst Electr Electron Mater Eng 2005;18(11):977-982.   Published online November 1, 2005
DOI: https://doi.org/10.4313/JKEM.2005.18.11.977
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