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"RTP firing"

Energy Materials : Co-firing Optimization of Crystalline Silicon Solar Cell Using Rapid Thermal Process
Byoung Jin Oh, In Hwan Yeo, Dong Gun Lim
J Electr Electron Mater 2012;25(3):236-240.   Published online March 1, 2012
Limiting thermal exposure time using rapid thermal processing(RTP) has emerged as promising simplified process for manufacturing of solar cell in a continuous way. This paper reports the simplification of co-firing using RTP. Actual temperature profile for co-firing after screen printing is a key issue for high-quality metal-semiconductor contact. The plateau time during the firing process were varied at 450℃ for 10~16 sec. Glass frit in Ag paste etch anti-reflection layer with plateau time. Glass frit in Ag paste is important for the Ag/Si contact formation and performances of crystalline Si solar cell. We achieved 17.14% efficiency with optimum conditions.
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