In this paper, for the application of ultrasonic cleaners for cleaning dentures and transparent braces, Pb(Mn1/3Nb2/3)O3-Pb(Ni1/3 Nb2/3)O3-Pb(Zr,Ti)O3 [PMN-PNN-PZT] system ceramics were manufactured and their dielectric and piezoelectric properties were investigated. Overall the best properties suitable for the device applications such as ultrasonic cleaner were obtained from the ceramics sintered at 920℃: bulk density of 7.8 g/㎤, the dielectric constant (εr) of 1,689, piezoelectric charge constant (d33) of 433 pC/N, planar electromechanical coupling factor (kp) of 0.64, mechanical quality factor (Qm) of 835, S11E of 13.37 (10-12 N/㎡), and Curie temperature of 315℃ By using the physical properties of this composition, the ultrasonic cleaner was designed and simulated using the commercial ATILA software. For the three-layered ceramics with the dimension of 25 mm × 25 mm × 2.5mm, an excellent displacement of 8.998 ×10-3 m) and the sound pressure of 147.68 dB were recorded.
The cause of the thickness non-uniformity in the large area deposition of SiO2 films by PECVD(Plasma Enhanced Chemical Vapor Deposition) was investigated by the plasma diagnostics. The spatial distribution of the plasma species in the chamber was obtained with DLP(Double Langmuir Probe) and the new-designed probe-type QMS(Quadrupole Mass Spectrometer). From the relationship between the spatial distribution of the plasma species and the depositing rate of the SiO2 films, it was conformed that the non-uniform deposition of SiO2 films was related with the spatial distribution of the oxygen radical density and electron temperature.
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P‐11: Effects of Ar Dilution on N2O/SiH4 PECVD for the Growth of Silicon Oxide Thin Films with Improved Breakdown Voltage Characteristics Aram Kim, Bokyoung Lee, Hyeona Kim, Jungho Bang, Seung Hee Nam, Kwon-Shik Park, Jeomjae Kim, Soo Young Yoon SID Symposium Digest of Technical Papers.2022; 53(1): 1078. CrossRef
In - situ diagnostics of PECVD AlO x deposition by optical emission spectroscopy Kyung Kim, Saul Winderbaum, Ziv Hameiri Surface and Coatings Technology.2017; 328: 204. CrossRef
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