Currently, semiconductor manufacturing industry heavily relies on a wide range of high global warming potential (GWP) gases, particularly during etching and cleaning processes, and their use and relevant carbon emissions are subject to global rules and regulations for achieving carbon neutrality by 2050. To replace high GWP gases in near future, dry etching using alternative low GWP gases is thus being under intense investigations. In this review, we report a current status and recent progress of the relevant research activities on dry etching processes using a low GWP gas. First, we review the concept of GWP itself and then introduce the difference between high and low GWP gases. Although most of the studies have concentrated on potentially replaceable additive gases such as C4F8, an ultimate solution with a lower GWP for main etching gases including CF4 should be developed; therefore, we provide our own perspective in this regard. Finally, we summarize the advanced dry etch process research with low GWP gases and list up several issues to be considered in future research.
Bulky iron-core potential transformers (PT) are installed in a tank of gas insulated switchgears (GIS) for a system voltage measurement in power substations. In this paper, we studied an electronic voltage transformer (EVT) embedded in a spacer for miniaturization, eco-friendliness, and performance improvement of GIS. The prototype EVT consists of a capacitive probe (CP) that can be embedded in a spacer and a voltage Follower with a high input and a low output impedance. The CP was fabricated in the form of a Flexible-PCB to acquire the insulation performance and to withstand vibration and shock during operation. Voltage ratio of the prototype EVT is about 42,270, and the frequency bandwidth of -3 dB ranges from 0.33 Hz to 3.9 MHz. The voltage ratio error evaluated at about 6%, 12% and 18% of the rated voltage of 170 kV was 0.32%, and the phase error was 12.9 minutes. These results were within the accuracy for the class 0.5 specified in IEC 60044-7 and satisfy even in ranges from 80% to 120% of the rated voltage. If the prototype EVT replaces the conventional iron-core potential transformer, it is expected that the height of the GIS could be reduced by 11% and the amount of SF6 will be reduced by at least 10%.
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To assess the condition of stator insulation, nondestructive and overpotential tests were performed on four high voltage motors. The stator windings under these tests have nominal ratings of 6.6 kV. After completing nondestructive tests, the AC overvoltage applied to the stator windings was gradually increasing until insulation failure in order to obtain the breakdown voltage. No. 1, No. 2, No. 3 and No. 4 of 6.6 kV motors failed near rated voltage of 18.4 kV, 19.8 kV, 19.7 kV and 21.7 kV, respectively. The breakdown voltage of four motors was higher that expected for good quality coils(14.2 kV) in 6.6 kV motors. Almost all of failures were located in a line-end coil at the exit from the core slot. The breakdown voltages and the types of defects showed strong relation to the stator insulation tests such as in the case of AC current, dissipation factor(tanδ) and partial discharge magnitude.
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