Skip to main navigation
Skip to main content
KIEEME
mobile search button
mobile menu button
Search
Advanced Search
ABOUT
ABOUT
Journal introduction
Aims and scope
Editorial board
Management team
Best practice
Subscription information
Contact us
BROWSE ARTICLES
All issues
Current issue
Most viewed
Most downloaded
Most cited
Search
Metrics
EDITORIAL POLICIES
Research ethics
Peer review policy
Copyright and open access policy
Article sharing policy
Archiving policy
Data sharing policy
Preprint policy
Crossmark policy
Advertising and sponsorship policy
Research misconduct-related regulations
FOR CONTRIBUTORS
Instructions for authors
Checklist
Copyright transfer agreement
Graphical abstract
E-SUBMISSION
Article Template
ABOUT
Journal introduction
Aims and scope
Editorial board
Management team
Best practice
Subscription information
Contact us
BROWSE ARTICLES
All issues
Current issue
Most viewed
Most downloaded
Most cited
Search
Metrics
EDITORIAL POLICIES
Research ethics
Peer review policy
Copyright and open access policy
Article sharing policy
Archiving policy
Data sharing policy
Preprint policy
Crossmark policy
Advertising and sponsorship policy
Research misconduct-related regulations
FOR CONTRIBUTORS
Instructions for authors
Checklist
Copyright transfer agreement
Graphical abstract
Page Path
HOME
Search
Plasma-induced etch damage
WHERE t1.sid in(parameter_dbtbl_keyword '%Plasma-induced etch damage%') and t1.xml_status <> 99
1
results for
"Plasma-induced etch damage"
Filter
Keywords
Capacitance (1)
Interface states (1)
MOS (1)
Plasma-induced etch damage (1)
Silvaco Atals (1)
Publication year
2008 (1)
Authors
Dae Hyung Cho (1)
Won Ju Cho (1)
Hong Bay Chung (1)
Yeong Deuk Jo (1)
Ji Hong Kim (1)
More +
Keywords
Capacitance (1)
Interface states (1)
MOS (1)
Plasma-induced etch damage (1)
Silvaco Atals (1)
Cancel
Close
authors
Dae Hyung Cho (1)
Won Ju Cho (1)
Hong Bay Chung (1)
Yeong Deuk Jo (1)
Ji Hong Kim (1)
Sang Mo Koo (1)
Byung Moo Moon (1)
Cancel
Close
Publication Year
2008 (1)
Cancel
Close
Funded articles
Cancel
Close
"Plasma-induced etch damage"
C-V Characterization of Plasma Etch-damage Effect on (100) SOI
Yeong Deuk Jo, Ji Hong Kim, Dae Hyung Cho, Byung Moo Moon, Won Ju Cho, Hong Bay Chung, Sang Mo Koo
J Korean Inst Electr Electron Mater Eng
2008;21(8):711-714.
Published online August 1, 2008
DOI:
https://doi.org/10.4313/JKEM.2008.21.8.711
PDF
63
View
0
Download
First
Prev
Page
of 1
Next
Last
×
TOP
First
Prev
