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Plasma temperature
WHERE t1.sid in(parameter_dbtbl_keyword '%Plasma temperature%') and t1.xml_status <> 99
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Hollow cathode (1)
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Jun Hoi Lee (1)
Sung Jik Lee (1)
Min Soo Lee (1)
Jae Soo Shin (1)
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"Plasma temperature"
Measurement of Ar Temperature of Hollow Cathode Discharge Plasma
Jun Hoi Lee, Jae Soo Shin, Sung Jik Lee, Min Soo Lee
J Korean Inst Electr Electron Mater Eng
2005;18(4):381-385.
Published online April 1, 2005
DOI:
https://doi.org/10.4313/JKEM.2005.18.4.381
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