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"Plasma enhanced chemical vapor deposition"

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"Plasma enhanced chemical vapor deposition"

The Effect of Barrier Layer on Thin-film Silicon Solar Cell Using Graphite Substrates
Young Joon Cho, Lee Dong Won, Jun Sik Cho, Hyo Sik Chang
J Electr Electron Mater 2016;29(8):505-509.   Published online August 1, 2016
We have investigated the characteristics of amorphous silicon (a-Si) thin-film solar cell by inserting barrier layer. The conversion efficiency of a-Si thin-film solar cells on graphite substrate shows nearly zero because of the surface roughness of the graphite substrate. To enhance the performance of solar cells, the surface morphology of the back side were modified by changing the barrier layer on graphite. The surface roughness of graphite substrate with the barrier layer grown by plasma enhanced chemical vapor deposition (PECVD) reduced from ~2 um to ~75 nm. In this study, the combination of the barrier layer on graphite substrate is important to increase solar cell efficiency. We achieved ~ 7.8% cell efficiency for an a-Si thin-film solar cell on graphite substrate with SiNx/SiOx stack barrier layer.
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Growth and Resistance Properties of Carbon Nanowall According to the Variation of Reaction Gas
Sung Yun Kim, Sang Joon Lee, Won Seok Choi, Yeun Ho Joung, Dong Gun Lim
J Electr Electron Mater 2014;27(4):217-220.   Published online April 1, 2014
Graphite electrodes are used for secondary batteries, fuel cells, and super capacitors. Research is underway to increase the reaction area of graphite electrodes. In this study, we have investigated the growth properties of carbon nanowall (CNW) according to the ingredient of gas. Microwave plasma enhanced chemical vapor deposition (MPECVD) system was used to grow CNW on Si substrate with a variety of the reaction gas. The planar and vertical growth conditions of the grown CNWs according to the ingredient of the gas were characterized by a field emission scanning electron microscopy (FE-SEM) and energy dispersive spectroscopy (EDS). The electrical characteristics of CNWs were analyzed using a4-point probe.
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Optimization of Growth Gases for the Low-temperature Synthesis of Carbon Nanotubes
Young Rae Kim, Hong Jun Jeon, Han Sung Lee, Jeung Choon Goak, Ho Soo Hwang, Byung Yun Kong, Nae Sung Lee
J Electr Electron Mater 2009;22(4):342-349.   Published online April 1, 2009
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