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Permanent magnet array
WHERE t1.sid in(parameter_dbtbl_keyword '%Permanent magnet array%') and t1.xml_status <> 99
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Facing target sputtering (1)
High deposition rate (1)
Low deposition temperature (1)
Permanent magnet array (1)
Silicon oxide (1)
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2009 (1)
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Kang Bae (1)
Jae Suk Hong (1)
Hwa Min Kim (1)
Sun Young Sohn (1)
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Facing target sputtering (1)
High deposition rate (1)
Low deposition temperature (1)
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"Permanent magnet array"
Characteristics of SiOx Gas Barrier Films as a Function of Process Conditions in Facing Target Sputtering (FTS) System
Kang Bae, Tae Hyun Wang, Sun Young Sohn, Hwa Min Kim, Jae Suk Hong
J Korean Inst Electr Electron Mater Eng
2009;22(7):595-601.
Published online July 1, 2009
DOI:
https://doi.org/10.4313/JKEM.2009.22.7.595
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