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"Patterning"

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"Patterning"

Micropattern Arrays of Polymers/Quantum Dots Formed by Electrohydrodynamic Jet (e-jet) Printing
Simon Kim, Su Eon Lee, Bong Hoon Kim
J Korean Inst Electr Electron Mater Eng 2022;35(1):18-23.   Published online January 1, 2022
DOI: https://doi.org/10.4313/JKEM.2022.35.1.3
Electrohydrodynamic jet (e-jet) printing, a type of direct contactless microfabrication technology, is a versatile fabrication process that enables a wide range of micro/nanopattern arrays by applying a strong electric field between the nozzle and the substrate. In general, the morphology and the thickness of polymers/quantum dot micropatterns show a systematic dependence on the diameter of the nozzle and the ink composition with a fully automated printing machine. The purpose of this report is to provide typical examples of e-jet printed micropatterns of polymers/quantum dots to explain the effect of each process variable on the result of experiments. Here, we demonstrate several operating conditions that allow high-resolution printing of layers of polymers/quantum dots with a precise control over thickness and submicron lateral resolution.
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Fabrication of Multi-Fin-Gate GaN HEMTs Using Honeycomb Shaped Nano-Channel
Jeong Jin Kim, Jong Won Lim, Dong Min Kang, Sung Bum Bae, Ho Young Cha, Jeon Wook Yang, Hyeong Seok Lee
J Korean Inst Electr Electron Mater Eng 2020;33(1):16-20.   Published online January 1, 2020
DOI: https://doi.org/10.4313/JKEM.2021.33.1.4
In this study, a patterning method using self-aligned nanostructures was introduced to fabricate GaN-based fin-gate HEMTs with normally-off operation, as opposed to high-cost, low-productivity e-beam lithography. The honeycomb-shaped fin-gate channel width is approximately 40~50 nm, which is manufactured with a fine width using a proposed method to obtain sufficient fringing field effect. As a result, the threshold voltage of the fabricated device is 0.6 V, and the maximum normalized drain current and transconductance of Gm are 136.4 mA/mm and 99.4 mS/mm, respectively. The fabricated devices exhibit a smaller sub-threshold swing and higher Gm peak compared to conventional planar devices, due to the fin structure of the honeycomb channel.
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Development of Nanowire Patterning Process Using Microcontact Printing
Sungjin Jo
J Korean Inst Electr Electron Mater Eng 2016;29(9):571-575.   Published online September 1, 2016
DOI: https://doi.org/10.4313/JKEM.2016.29.9.571
Recently, there has been much focus on the controlled alignment and patterning process of nanowires for nanoelectronic devices. A simple and effective method for patterning of highly aligned nanowires using a microcontact printing technique is demonstrated. In this method, nanowires are first directionally aligned by contact printing, following which line and space micropatterns of nanowire arrays are accomplished by microcontact printing with a micro patterned NOA mold.
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Overlapping Rates of Laser Spots on the Laser Direct Patterning of ITO Electrode in the Double-Layer Structure of Thin Film
Jian Xun Wang, Jung Cheul Park, Sang Jik Kwon, Eou Sik Cho
J Korean Inst Electr Electron Mater Eng 2012;25(5):377-380.   Published online May 1, 2012
DOI: https://doi.org/10.4313/JKEM.2012.25.5.377
Laser direct patterning of indium tin oxide(ITO) is one of new methods of direct etching process to replace the conventional photolithography. A diode pumped Q-switched Nd:YVO4 (λ= 1,064 nm) laser was used to produce ITO electrode on various transparent oxide semiconductor films such as zinc oxide(ZnO). The laser direct etched ITO patterns on ZnO were compared with those on glass substrate and were considered in terms of the overlapping rate of laser beam. In case of the laser etching on double-layer, it was possible to obtain the higher overlapping rate of laser beam.
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Effect of Laser Scanning Speed on the Laser Direct Patterning of T-shaped Indium Tin Oxide (ITO) Electrode for High Luminous AC Plasma Display Panels
Zhao Hui Li, Eou Sik Cho, Sang Jik Kwon
J Korean Inst Electr Electron Mater Eng 2010;23(2):133-136.   Published online February 1, 2010
DOI: https://doi.org/10.4313/JKEM.2010.23.2.133
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Simultaneous Patterning and Passivation of P3HT-OTFTs with Photosensitive Poly Vinyl-alcohol(PVA) Layer
Dong Hyun Nam, Kyeong Dong Park, Jeong Hwan Park, Kyo Yong Han
J Korean Inst Electr Electron Mater Eng 2008;21(5):426-433.   Published online May 1, 2008
DOI: https://doi.org/10.4313/JKEM.2008.21.5.426

Citations

Citations to this article as recorded by  
  • Effects of Organic Passivation Films on Properties of Polymer Solar Cells with P3HT:PC61BM Active Layers
    Sang Hee Lee, Byung Min Park, Yang Keun Cho, Ho Jung Chang, Jae Jin Jung, Jaeho Pyee
    Journal of the Microelectronics and Packaging Society.2014; 21(4): 105.     CrossRef
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Study on Photolithographic Patterning for P3HT Active Layer
J Korean Inst Electr Electron Mater Eng 2007;20(4):294-302.   Published online April 1, 2007
DOI: https://doi.org/10.4313/JKEM.2007.20.4.294

Citations

Citations to this article as recorded by  
  • Improved Air Stability of OTFT`s with a P3HT/POSS Active Layer
    Jeong Hwan Park, Kyo Yong Han
    Journal of Korean Institute of Electrical and Electronic Materials Engineers.2009; 22(2): 107.     CrossRef
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  • 1 Crossref