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Parelene
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"Parelene"
Characteristics of Defects in SiOx Thin Films on Ethylene Terephthalate by High-temperature E-beam Deposition
J Korean Inst Electr Electron Mater Eng
2006;19(1):71-74.
Published online January 1, 2006
DOI:
https://doi.org/10.4313/JKEM.2006.19.1.071
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