In order to prevent heat loss that occurs through the glass, low-emissivity (Low-E) coating methods with good insulating properties and high transmittance were used. lnGaZnO/Ag/InGaZnO (IGZO/Ag/IGZO) multilaver thin films have been deposited on XG glass substrate by HF magnetron sputtering. Depending on the different thickness of Ag in multilayer films, the structural and optical properties of Low-E multilayer films were analyzed. By XRI) analysis results, the multilayer thin films were observed to be amorphous structure regardless of Ag thickness. According to the AFM results, surface morphology of the multilayer films was observed and compared. Using UV-VIS spectroscopy, low emissivity propertty has been observed clearly with the transmittance of higher than 85% at visible range and lower than 30 at ll range.