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NH3 ambient
WHERE t1.sid in(parameter_dbtbl_keyword '%NH3 ambient%') and t1.xml_status <> 99
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Diffusion barrier (1)
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TiN (1)
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2004 (1)
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Gyu Sig Bae (1)
Hyeong Tag Jeon (1)
Ju Yeon Kim (1)
Yeong Ho Kwon (1)
Geun U Lee (1)
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"NH3 ambient"
Formation of TiN by Ti Nitridation in NH3 Ambient
Geun U Lee, Su Jin Park, Jeong Ju Yu, Yeong Ho Kwon, Ju Yeon Kim, Hyeong Tag Jeon, Gyu Sig Bae
J Korean Inst Electr Electron Mater Eng
2004;17(2):150-155.
Published online February 1, 2004
DOI:
https://doi.org/10.4313/JKEM.2004.17.2.150
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