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Molecular dynamics simulations
WHERE t1.sid in(parameter_dbtbl_keyword '%Molecular dynamics simulations%') and t1.xml_status <> 99
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Chemical mechanical polishing (1)
CMP (1)
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Molecular dynamics simulations (1)
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2005 (1)
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Chemical mechanical polishing (1)
CMP (1)
Modeling and simulation (1)
Molecular dynamics simulations (1)
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"Molecular dynamics simulations"
Atomic Scale Modeling of Chemical Mechanical Polishing Process
J Electr Electron Mater
2005;18(5):414-422.
Published online May 1, 2005
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