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Molecular dynamics simulation
WHERE t1.sid in(parameter_dbtbl_keyword '%Molecular dynamics simulation%') and t1.xml_status <> 99
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Atomic force microscope multi-wall carbon nanotube tip (1)
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Chemical mechanical polishing (1)
CMP (1)
Modeling and simulation (1)
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2005 (1)
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Atomic force microscope multi-wall carbon nanotube tip (1)
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Chemical mechanical polishing (1)
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Molecular dynamics simulation (1)
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"Molecular dynamics simulation"
Atomic Scale Modeling of Chemical Mechanical Polishing Process
J Electr Electron Mater
2005;18(5):414-422.
Published online May 1, 2005
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Molecular Dynamics Simulations of Fullerene Nanostructure Fabrications by Atomic Force Microscope Carbon Nanotube tip
J Electr Electron Mater
2004;17(8):812-822.
Published online August 1, 2004
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