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"Modified illumination"

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"Modified illumination"

Modified Illumination with a Concentric Circular Grating at the Backside of a Photomask
J Korean Inst Electr Electron Mater Eng 2005;18(3):212-215.   Published online March 1, 2005
DOI: https://doi.org/10.4313/JKEM.2005.18.3.212
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Modified Illumination by Binary Phase Diffractive Patterns on the Backside of a Photomask
Jai Cheol Lee, Yong Ho Oh, Chun Soo Go
J Korean Inst Electr Electron Mater Eng 2004;17(7):697-700.   Published online July 1, 2004
DOI: https://doi.org/10.4313/JKEM.2004.17.7.697
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