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Microcrystalline-silicon
WHERE t1.sid in(parameter_dbtbl_keyword '%Microcrystalline-silicon%') and t1.xml_status <> 99
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Hydrogen dilution (1)
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2008 (1)
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Chang Kyo Kim (1)
Ho Nyeon Lee (1)
Jong Ha Lee (1)
Byoung Wook Lee (1)
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"Microcrystalline-silicon"
A Study on Characteristics of Microcrystalline-silicon Films Fabricated by PECVD Method
Ho Nyeon Lee, Jong Ha Lee, Byoung Wook Lee, Chang Kyo Kim
J Electr Electron Mater
2008;21(9):848-852.
Published online September 1, 2008
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