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Micro heater
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"Micro heater"
Gradational Double Annealing Process for Improvement of Thermal Characteristics of NiCr Thin Films
J Korean Inst Electr Electron Mater Eng
2005;18(8):714-719.
Published online August 1, 2005
DOI:
https://doi.org/10.4313/JKEM.2005.18.8.714
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