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"MMIC"

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"MMIC"

Characteristics of MHEMT Devices Having T-Shaped Gate Structure for W-Band MMIC
Jong-min Lee, Byoung-gue Min, Sung-jae Chang, Woo-jin Chang, Hyung Sup Yoon, Hyun-wook Jung, Seong-il Kim, Dong Min Kang, Wansik Kim, Jooyong Jung, Jongpil Kim, Mihui Seo, Sosu Kim
J Electr Electron Mater 2020;33(2):99-104.   Published online March 1, 2020
DOI: https://doi.org/10.4313/JKEM.2021.33.2.4
In this study, we fabricated a metamorphic high-electron-mobility transistor (mHEMT) device with a T-type gate structure for the implementation of W-band monolithic microwave integrated circuits (MMICs) and investigated its characteristics. To fabricate the mHEMT device, a recess process for etching of its Schottky layer was applied before gate metal deposition, and an e-beam lithography using a triple photoresist film for the T-gate structure was employed. We measured DC and RF characteristics of the fabricated device to verify the characteristics that can be used in W-band MMIC design. The mHEMT device exhibited DC characteristics such as a drain current density of 747 mA/mm, maximum transconductance of 1.354 S/mm, and pinch-off voltage of -0.42 V. Concerning the frequency characteristics, the device showed a cutoff frequency of 215 GHz and maximum oscillation frequency of 260 GHz, which provide sufficient performance for W-band MMIC design and fabrication. In addition, active and passive modeling was performed and its accuracy was evaluated by comparing the measured results. The developed mHEMT and device models could be used for the fabrication of W-band MMICs.
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Deposition and Electrical Properties of Silicon Nitride Thin Film MIM Capacitors for MMIC Applications
Ho Geun Seong, Sun Jin So, Chun Bae Park
J Electr Electron Mater 2004;17(3):283-288.   Published online March 1, 2004
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Monolithic Film Bulk Acoustic Wave Resonator using SOI Wafer
In Tae Kim, Yun Kwon Park, Si Hyung Lee, Yun Hi Lee, Jeon Kook Lee, Nam Soo Kim, Byeong Kwon Ju
J Electr Electron Mater 2002;15(12):1039-1044.   Published online December 1, 2002
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