With trend of the miniaturization and the high-functionalizing of mobile communication system, low-loss microwave dielectric materials are widely used for high frequency communication components. These dielectric materials should be co-sintered with highly electric-conducting metal such as silver or copper for high-frequency and thick film process application. Sintering temperature of Ca[(Li1/3Nb2/3)1-xTix]O3-δ, which has excellent dielectric properties such as εr above 40, quality factor (Q·f0) above 16,000 GHz, and TCF (temperature coefficient of resonant frequency) of -20~-10 ppm/℃, is reported as high as 1,175℃, so it could not be co-sintered with silver or copper. Therefore in this study, low-temperature melting glasses of Zn-B-O and Zn-B-Si-O systems were added to Ca[(Li1/3Nb2/3)1-xTix]O3-δ to lower its sintering temperature under 900℃ without losing excellency of dielectric properties. With 15 weight % of Zn-B-Si-O glass and sintered at 875℃, specimen showed density of 4.11 g/cm3,ε r of 40.1, Q·f0 of 4,869 GHz, and TCF of -5.9 ppm/℃. With 15 weight % of Zn-B-O glass and sintered at 87 5℃, specimen showed density of 4.14 g/cm3, εr of 40.4, Q·f0 of 7,059 GHz, and TCF of -0.92 ppm/℃.
A novel design of gas sensor using Ga-doped ZnO (GZO) thin films which are deposited on low temperature co-fired ceramic (LTCC) substrates is presented. The LTCC substrates with thickness of 400 μm are fabricated by laminating 12 green tapes which consist of alumina and glass particle in an organic binder. The GZO thin films with different thickness are deposited on LTCC substrates, by RF magnetron sputtering method. The microstructure and sensing properties of GZO gas sensing films are analyzed as a function of the film thickness. The films are well crystallized in the hexagonal (wurzite) structure with increasing thickness. The maximum sensitivity of 3.49 is obtained at 100 nm film thickness and the fastest 90% response time of 27.2 sec is obtained at 50 nm film thickness for the operating temperature of 400oC to the NO2 gas.