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Low dielectric
WHERE t1.sid in(parameter_dbtbl_keyword '%Low dielectric%') and t1.xml_status <> 99
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"Low dielectric"
A Study of Optical Characteristics Correlated With Low Dielectric Constant of SiOCH Thin Films Through Ellipsometry
Yong Heon Park
J Electr Electron Mater
2010;23(3):228-233.
Published online March 1, 2010
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A study on deposition and characterization of low-k Parylene film
J Electr Electron Mater
1999;12(4):326-332.
Published online April 1, 1999
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